Products and Service

2023.12.11

Tokyo Electron Launches Ulucus™ G, a wafer thinning system for 300ｍｍ wafer fabrication

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2023.12.11

Tokyo Electron Develops an Extreme Laser Lift Off Technology That Contributes to Innovations in 3D Integration of Advanced Semiconductor Devices

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2023.08.24

Tokyo Electron Announces Launch of Plasma Etch Modules PICP™ EX Plus and APX for 8.7th Generation Flat Panel Displays

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2023.06.09

Tokyo Electron Develops Memory Channel Hole Etch Technology That Enables Ultra-fast 10-µm-deep Etching for 3D NAND Flash with Over 400 Layers and an 84% Reduction of Global Warming Potential

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2022.12.12

Tokyo Electron Introduces CELLESTA™ MS2, a Surface Preparation System

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2022.06.08

Tokyo Electron Introduces Ulucus™ L, a Laser Edge Trimming System for 300ｍｍ Wafer-Bonded Devices

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2021.12.14

Tokyo Electron Introduces Tactras™-UDEMAE™, the Etch System for 300mm Power Devices

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2021.12.08

Tokyo Electron Announces the Launch of PICP™ Pro Plasma Etch Systems for Manufacturing 8th Generation Flat Panel Displays

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2021.08.30

Tokyo Electron Introduces Prexa™, the Next-Generation 300mm Wafer Prober

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2021.03.10

Tokyo Electron Announces the Launch of PICP™ Pro Plasma Etch Systems for Manufacturing High Resolution Flat Panel Displays

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2021.01.14

TEL Introduces Episode™ UL as the Next Generation Etch Platform

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2020.12.08

TEL Announces the Launch of CELLESTA™ SCD, a Single Wafer Cleaning System

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2019.10.17

TEL Announces the Launch of Elius™500 Pro, an Inkjet Printing System for OLED Display Production

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2019.03.13

TEL Announces the Launch of CELLESTA™ Pro SPM, a Single Wafer Cleaning System

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2018.12.07

TEL announces the launch of MERCURY™+, a Batch Spray Cleaning System, with shipments starting in March 2019

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2018.10.16

TEL Announces the Launch of Impressio™3300 PICP™, a Dry Etch System for Manufacturing G10.5 High-Definition Flat Panel Displays

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2018.10.16

TEL Announces the Launch of Elius™1000, an Inkjet Printing System for OLED Panel Production

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2018.07.10

TEL announces the relaunch of MERCURY™ MP, a Batch Spray Cleaning System

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2018.07.05

TEL announces the launch of Triase+™ EX-II Pro™, a Single-Wafer Metallization System

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2017.12.07

Tokyo Electron Begins Accepting Orders for Betelex™ 1800 PICP, a Dry Etch System for High Resolution Flat Panel Displays

Topics Products / Service IR Sustainability Event Disaster

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